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Katsuhiko Sakai
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Control system, control determination device, and control method
Patent number
11,570,206
Issue date
Jan 31, 2023
Nippon Telegraph and Telephone Corporation
Hiroshi Suzuki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Charged particle beam apparatus and dimension measuring method
Patent number
8,030,614
Issue date
Oct 4, 2011
Hitachi High-Technologies Corporation
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and dimension measuring method
Patent number
7,973,282
Issue date
Jul 5, 2011
Hitachi High-Technologies Corporation
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and dimension measuring method
Patent number
7,214,936
Issue date
May 8, 2007
Hitachi High-Technologies Corporation
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CONTROL SYSTEM, CONTROL DETERMINATION DEVICE, AND CONTROL METHOD
Publication number
20210029160
Publication date
Jan 28, 2021
Nippon Telegraph and Telephone Corporation
Hiroshi Suzuki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD
Publication number
20090314938
Publication date
Dec 24, 2009
Hitachi High-Technologies Corporation
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam apparatus and dimension measuring method
Publication number
20080100832
Publication date
May 1, 2008
Hitachi High-Technologies Corporation
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam apparatus and dimension measuring method
Publication number
20060071166
Publication date
Apr 6, 2006
Mitsugu Sato
H01 - BASIC ELECTRIC ELEMENTS