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Katsuhiko Sakai
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Katsuta, JP
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last 30 patents
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Patent Grant
Vibration cancellation system for a charged particle beam apparatus
Patent number
6,043,490
Issue date
Mar 28, 2000
Hitachi, Ltd.
Katsuhiko Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for suppressing electrification of sample in charged beam...
Patent number
5,668,368
Issue date
Sep 16, 1997
Hitachi, Ltd.
Katsuhiko Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for ion beam neutralization
Patent number
5,576,538
Issue date
Nov 19, 1996
Hitachi, Ltd.
Katsuhiko Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for suppressing electrification of sample in c...
Patent number
5,466,929
Issue date
Nov 14, 1995
Hitachi, Ltd.
Katsuhiko Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam irradiating apparatus having charge suppressing devic...
Patent number
4,939,360
Issue date
Jul 3, 1990
Hitachi, Ltd.
Katsuhiko Sakai
H01 - BASIC ELECTRIC ELEMENTS