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Katsuhiko Sugisawa
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Kanagawa, JP
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last 30 patents
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Patent Grant
Nitrogen doped silicon wafer and manufacturing method thereof
Patent number
7,875,117
Issue date
Jan 25, 2011
Sumco Techxiv Corporation
Kouzo Nakamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
NITORGEN DOPED SILICON WAFER AND MANUFACTURING METHOD THEREOF
Publication number
20070218570
Publication date
Sep 20, 2007
KOMATSU ELECTRONIC METALS CO., LTD
Kouzo Nakamura
C30 - CRYSTAL GROWTH