Katsuhiro Funabashi

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam processing method
- Patent number 8,431,913
- Issue date Apr 30, 2013
- Canon Kabushiki Kaisha
- Katsuhiro Funabashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM PROCESSING METHOD
- Publication number 20100213393
- Publication date Aug 26, 2010
- Canon Kabushiki Kaisha
- Katsuhiro Funabashi
- H01 - BASIC ELECTRIC ELEMENTS