TREA

Katsuhiro Harada

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Optical projection exposure method and system using the same
    • Patent number 5,208,629
    • Issue date May 4, 1993
    • Nippon Telegraph and Telephone Corporation
    • Seitaro Matsuo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Highly sensitive positive resist mixture
    • Patent number 4,820,609
    • Issue date Apr 11, 1989
    • Nippon Telegraph & Telephone Corporation
    • Kazumi Iwadate
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Patterning method
    • Patent number 4,699,870
    • Issue date Oct 13, 1987
    • Nippon Telegraph & Telephone Corporation
    • Kazumi Iwadate
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Electron beam lithography apparatus
    • Patent number 4,692,579
    • Issue date Sep 8, 1987
    • Hitachi, Ltd.
    • Norio Saitou
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Method of forming resist micropattern
    • Patent number 4,634,645
    • Issue date Jan 6, 1987
    • Nippon Telegraph & Telephone Corporation
    • Tadahito Matsuda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY