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Katsuhiro Kawasaki
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Katsuta, JP
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last 30 patents
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Patent Grant
Method for manufacturing semiconductor devices utilizing plurality...
Patent number
6,225,011
Issue date
May 1, 2001
Hitachi, Ltd.
Yasuko Gotoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron beam writing method and apparatus for carrying out the same
Patent number
5,759,423
Issue date
Jun 2, 1998
Hitachi, Ltd.
Yasunari Sohda
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam lithography system
Patent number
5,326,979
Issue date
Jul 5, 1994
Hitachi, Ltd.
Katsuhiro Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and method
Patent number
5,209,813
Issue date
May 11, 1993
Hitachi, Ltd.
Yoshitada Oshida
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam lithography
Patent number
4,710,640
Issue date
Dec 1, 1987
Hitachi, Ltd.
Katsuhiro Kawasaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam apparatus
Patent number
4,524,277
Issue date
Jun 18, 1985
Hitachi, Ltd.
Yoshimasa Shimura
H01 - BASIC ELECTRIC ELEMENTS