Katsuhiro Kitahashi

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Hitachinaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect observation method and defect observation device
- Patent number 8,824,773
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method
- Patent number 7,181,060
- Issue date Feb 20, 2007
- Hitachi, Ltd.
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Investigation device and investigation method
- Patent number 6,968,079
- Issue date Nov 22, 2005
- Hitachi, Ltd.
- Akira Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20130140457
- Publication date Jun 6, 2013
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Application
SEM TYPE DEFECT OBSERVATION DEVICE AND DEFECT IMAGE ACQUIRING METHOD
- Publication number 20120327212
- Publication date Dec 27, 2012
- Hitachi High-Technologies Corporation
- Katsuhiro Kitahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspection method
- Publication number 20030015659
- Publication date Jan 23, 2003
- Hitachi, Ltd
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
Investigation device and investigation method
- Publication number 20020001404
- Publication date Jan 3, 2002
- Akira Yoshikawa
- G06 - COMPUTING CALCULATING COUNTING