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Katsuhiro Kobayashi
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Patents Grants
last 30 patents
Information
Patent Grant
Positive resist composition and patterning process
Patent number
8,871,427
Issue date
Oct 28, 2014
Shin-Etsu Chemical Co., Ltd.
Ryosuke Taniguchi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Patterning process and pattern surface coating composition
Patent number
8,105,760
Issue date
Jan 31, 2012
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
8,030,515
Issue date
Oct 4, 2011
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorinated monomer, fluorinated polymer, resist composition and pa...
Patent number
7,981,589
Issue date
Jul 19, 2011
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,928,262
Issue date
Apr 19, 2011
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,919,226
Issue date
Apr 5, 2011
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Lactone-containing compound, polymer, resist composition, and patte...
Patent number
7,833,694
Issue date
Nov 16, 2010
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and patterning process
Patent number
7,618,765
Issue date
Nov 17, 2009
Shin-Etsu Chemical Co., Ltd.
Tsunehiro Nishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,569,324
Issue date
Aug 4, 2009
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,556,909
Issue date
Jul 7, 2009
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and patterning process
Patent number
7,541,133
Issue date
Jun 2, 2009
Shin-Etsu Chemical Co., Ltd.
Tsunehiro Nishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,531,290
Issue date
May 12, 2009
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonate salts and derivatives, photoacid generators, resist compo...
Patent number
7,511,169
Issue date
Mar 31, 2009
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonyldiazomethane compounds, photoacid generator, resist materia...
Patent number
7,282,316
Issue date
Oct 16, 2007
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Nitrogen-containing organic compound, resist composition and patter...
Patent number
7,276,324
Issue date
Oct 2, 2007
Shin-Etsu Chemical Co., Ltd.
Takeru Watanabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoacid generators, chemically amplified resist compositions, and...
Patent number
7,235,343
Issue date
Jun 26, 2007
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photo acid generator, chemical amplification resist material
Patent number
7,211,367
Issue date
May 1, 2007
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonyldiazomethanes, photoacid generators, resist compositions, a...
Patent number
7,109,311
Issue date
Sep 19, 2006
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sulfonyldiazomethanes, photoacid generators, resist compositions, a...
Patent number
7,101,651
Issue date
Sep 5, 2006
Shin-Etsu Chemical Co.,Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photo acid generator, chemical amplification resist material and pa...
Patent number
7,090,961
Issue date
Aug 15, 2006
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photoacid generators, chemically amplified resist compositions, and...
Patent number
6,916,591
Issue date
Jul 12, 2005
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonyldiazomethanes, photoacid generators, resist compositions, a...
Patent number
6,713,612
Issue date
Mar 30, 2004
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonyldiazomethanes, photoacid generations, resist compositions,...
Patent number
6,689,530
Issue date
Feb 10, 2004
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20130045444
Publication date
Feb 21, 2013
Shin-Etsu Chemical Co., Ltd.
Ryosuke TANIGUCHI
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NOVEL SULFONATE SALTS AND DERIVATIVES, PHOTOACID GENERATORS, RESIST...
Publication number
20110160481
Publication date
Jun 30, 2011
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
LACTONE-CONTAINING COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTE...
Publication number
20090233242
Publication date
Sep 17, 2009
Koji HASEGAWA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PATTERNING PROCESS AND PATTERN SURFACE COATING COMPOSITION
Publication number
20090053657
Publication date
Feb 26, 2009
Shin-Etsu Chemical Co., Ltd.
Jun HATAKEYAMA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
FLUORINATED MONOMER, FLUORINATED POLYMER, RESIST COMPOSITION AND PA...
Publication number
20090035699
Publication date
Feb 5, 2009
Koji HASEGAWA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Novel sulfonate salts and derivatives, photoacid generators, resist...
Publication number
20080318160
Publication date
Dec 25, 2008
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Positive resist composition and patterning process
Publication number
20080254386
Publication date
Oct 16, 2008
Shin-Etsu Chemical Co., Ltd.
Tsunehiro Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NOVEL SULFONATE SALTS AND DERIVATIVES, PHOTOACID GENERATORS, RESIST...
Publication number
20080124656
Publication date
May 29, 2008
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Positive resist composition and patterning process
Publication number
20080124652
Publication date
May 29, 2008
Shin-Etsu Chemical Co., Ltd.
Tsunehiro Nishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NOVEL SULFONATE SALTS AND DERIVATIVES, PHOTOACID GENERATORS, RESIST...
Publication number
20070298352
Publication date
Dec 27, 2007
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Photoresist undercoat-forming material and patterning process
Publication number
20070275325
Publication date
Nov 29, 2007
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Novel sulfonate salts and derivatives, photoacid generators, resist...
Publication number
20070099113
Publication date
May 3, 2007
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Novel sulfonate salts and derivatives, photoacid generators, resist...
Publication number
20070099112
Publication date
May 3, 2007
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Novel sulfonate salts and derivatives, photoacid generators, resist...
Publication number
20060228648
Publication date
Oct 12, 2006
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Photo acid generator, chemical amplification resist material and pa...
Publication number
20060160023
Publication date
Jul 20, 2006
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Nitrogen-containing organic compound, resist composition and patter...
Publication number
20050106500
Publication date
May 19, 2005
Shin-Etsu Chemical Co., Ltd.
Takeru Watanabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Novel sulfonyldiazomethane compounds, photoacid generator, resist m...
Publication number
20050048395
Publication date
Mar 3, 2005
Shin-Etsu Chemical Co., Ltd.
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Photoacid generators, chemically amplified resist compositions, and...
Publication number
20040229162
Publication date
Nov 18, 2004
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Novel sulfonyldiazomethanes, photoacid generators, resist compositi...
Publication number
20040167322
Publication date
Aug 26, 2004
Youichi Ohsawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Novel sulfonyldiazomethanes, photoacid generators, resist compositi...
Publication number
20040166432
Publication date
Aug 26, 2004
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Photo acid generator, chemical amplification resist material and pa...
Publication number
20030224290
Publication date
Dec 4, 2003
Tomohiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Novel sulfonyldiazomethanes, photoacid generators, resist compositi...
Publication number
20030224298
Publication date
Dec 4, 2003
Katsuhiro Kobayashi
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Photoacid generators, chemically amplified resist compositions, and...
Publication number
20030215738
Publication date
Nov 20, 2003
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Novel sulfonyldiazomethanes, photoacid generations, resist composit...
Publication number
20030180653
Publication date
Sep 25, 2003
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY