Katsuhiro KOSUGA

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer holding apparatus and baseplate structure
- Patent number 10,847,401
- Issue date Nov 24, 2020
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER HOLDING APPARATUS AND BASEPLATE STRUCTURE
- Publication number 20170372934
- Publication date Dec 28, 2017
- Shinko Electric Industries Co., Ltd.
- Norio SHIRAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAP APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150107771
- Publication date Apr 23, 2015
- TOHOKU SEIMITSU CO., LTD.
- Atsushi KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...