Katsuhiro Morikawa

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing liquid nozzle and cleaning apparatus
- Patent number 12,109,580
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Daisuke Goto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus with moving device for connecting an...
- Patent number 11,637,035
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Satoshi Morita
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 11,600,500
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Kouzou Tachibana
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus including periphery cover body
- Patent number 11,551,945
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,532,492
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying apparatus, substrate processing system, and drying method
- Patent number 11,515,182
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,510,284
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 11,244,849
- Issue date Feb 8, 2022
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,725
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kouichi Mizunaga
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 11,097,907
- Issue date Aug 24, 2021
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 10,460,976
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Katsuhiro Morikawa
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer method and storage medium
- Patent number 10,128,138
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method for correcting positional di...
- Patent number 10,042,356
- Issue date Aug 7, 2018
- Tokyo Electron Limited
- Naruaki Iida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and me...
- Patent number 9,773,690
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of operating substrate proce...
- Patent number 9,696,262
- Issue date Jul 4, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,666,463
- Issue date May 30, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 9,627,238
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate processing apparatus, and subs...
- Patent number 9,373,531
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method and substrate transfer apparatus
- Patent number 8,554,360
- Issue date Oct 8, 2013
- Tokyo Electron Limited
- Katsuhiro Morikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Device and method for supporting a substrate
- Patent number 8,528,889
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Seiji Nakano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate transfer method and apparatus
- Patent number 8,441,618
- Issue date May 14, 2013
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer method and substrate transfer apparatus
- Patent number 7,987,019
- Issue date Jul 26, 2011
- Tokyo Electron Limited
- Katsuhiro Morikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate carrying apparatus, substrate carrying method, and coatin...
- Patent number 7,563,042
- Issue date Jul 21, 2009
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID NOZZLE AND CLEANING APPARATUS
- Publication number 20220371041
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Daisuke GOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220347711
- Publication date Nov 3, 2022
- TOKYO ELECTRON LIMITED
- Tetsuya Sakazaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220154342
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220130691
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220056590
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220020611
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Kouzou Tachibana
- B08 - CLEANING
Information Patent Application
DRYING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND DRYING METHOD
- Publication number 20200365425
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro MORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200312678
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transfer Device and Substrate Transfer Method
- Publication number 20200172351
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro MORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200105550
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200105574
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200107404
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200102654
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Kouichi Mizunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20200013666
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20170358479
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM
- Publication number 20170178935
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...
- Publication number 20160172225
- Publication date Jun 16, 2016
- Tokyo Electron Limited
- Katsuhiro MORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF OPERATING SUBSTRATE PROCE...
- Publication number 20150300960
- Publication date Oct 22, 2015
- Tokyo Electron Limited
- Katsuhiro MORIKAWA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR CORRECTING POSITIONAL DI...
- Publication number 20150235888
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Naruaki IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150187621
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...
- Publication number 20140234058
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...
- Publication number 20140178162
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20110257783
- Publication date Oct 20, 2011
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND APPARATUS
- Publication number 20100321648
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE
- Publication number 20100243168
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate carrying apparatus, sustrate carrying method, and coating...
- Publication number 20070195297
- Publication date Aug 23, 2007
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20070128008
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS

Katsuhiro Morikawa

Person

Patents Grantslast 30 patents

Processing liquid nozzle and cleaning apparatus

Substrate processing apparatus with moving device for connecting an...

Substrate processing method

Substrate processing apparatus including periphery cover body

Substrate processing apparatus and substrate processing method

Drying apparatus, substrate processing system, and drying method

Substrate processing apparatus

Substrate transfer device and substrate transfer method

Substrate processing apparatus

Substrate transfer device and substrate transfer method

Substrate transfer device and substrate transfer method

Substrate transfer method and storage medium

Substrate processing apparatus, method for correcting positional di...

Substrate processing apparatus, substrate processing system, and me...

Substrate processing apparatus, method of operating substrate proce...

Substrate processing apparatus

Substrate transfer apparatus, substrate transfer method, and storag...

Substrate transfer device, substrate processing apparatus, and subs...

Substrate transfer method and substrate transfer apparatus

Device and method for supporting a substrate

Substrate transfer method and apparatus

Substrate transfer method and substrate transfer apparatus

Substrate carrying apparatus, substrate carrying method, and coatin...

Patents Applicationslast 30 patents

PROCESSING LIQUID NOZZLE AND CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

DRYING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND DRYING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate Transfer Device and Substrate Transfer Method

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...

SUBSTRATE PROCESSING APPARATUS, METHOD OF OPERATING SUBSTRATE PROCE...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR CORRECTING POSITIONAL DI...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBS...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

SUBSTRATE TRANSFER METHOD AND APPARATUS

DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE

Substrate carrying apparatus, sustrate carrying method, and coating...

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS