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Katsuhiro Ota
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Process for semiconductor apparatus including forming an insulator...
Patent number
6,861,359
Issue date
Mar 1, 2005
Renesas Technology Corp.
Katsuhiro Ota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing slurry
Patent number
6,758,872
Issue date
Jul 6, 2004
Hitachi, Ltd.
Katsuhiro Ota
B24 - GRINDING POLISHING
Information
Patent Grant
Process for fabricating a semiconductor device
Patent number
6,656,021
Issue date
Dec 2, 2003
Hitachi, Ltd.
Katsuhiro Ota
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing a semiconductor substrate member
Patent number
6,656,022
Issue date
Dec 2, 2003
Hitachi, Ltd.
Katsuhiro Ota
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor cleaning and production methods using a film repulsin...
Patent number
6,029,679
Issue date
Feb 29, 2000
Hitachi, Ltd.
Katsuhiro Ota
B08 - CLEANING
Information
Patent Grant
Method of controlling adhesion of fine particles to an object in li...
Patent number
5,409,544
Issue date
Apr 25, 1995
Hitachi, Ltd.
Katsuhiro Ota
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor apparatus and process for its production
Publication number
20040026692
Publication date
Feb 12, 2004
Katsuhiro Ota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for polishing a semiconductor substrate member
Publication number
20020090894
Publication date
Jul 11, 2002
Katsuhiro Ota
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Process for fabricating a semiconductor device
Publication number
20020034925
Publication date
Mar 21, 2002
Katsuhiro Ota
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Polishing slurry
Publication number
20020004360
Publication date
Jan 10, 2002
Katsuhiro Ota
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...