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Charged particle beam apparatus
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Patent number 8,071,961
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Issue date Dec 6, 2011
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Hitachi High-Technologies Corporation
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Hiroaki Mito
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H01 - BASIC ELECTRIC ELEMENTS
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Electron microscope
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Patent number 7,626,166
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Issue date Dec 1, 2009
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Hitachi High-Technologies Corporation
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Hiroyuki Saito
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G01 - MEASURING TESTING
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Charged particle beam apparatus
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Patent number 7,601,974
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Issue date Oct 13, 2009
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Hitachi High-Technologies Corporation
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Hiroaki Mito
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron microscope
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Patent number 7,514,683
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Issue date Apr 7, 2009
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Hitachi High-Technologies Corporation
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Kazuma Tanii
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G01 - MEASURING TESTING
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Charged particle beam apparatus
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Patent number 7,247,864
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Issue date Jul 24, 2007
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Hitachi High-Technologies Corporation
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Hiroaki Mito
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 7,205,541
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Issue date Apr 17, 2007
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Hitachi High-Technologies Corporation
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Hiroaki Mito
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H01 - BASIC ELECTRIC ELEMENTS
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Electron beam apparatus
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Patent number 5,598,002
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Issue date Jan 28, 1997
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Hitachi, Ltd.
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Hideo Todokoro
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H01 - BASIC ELECTRIC ELEMENTS