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Katsuhiro Yamazaki
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,322,384
Issue date
May 3, 2022
Shin-Etsu Engineering Co., Ltd.
Shunya Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,573,540
Issue date
Feb 25, 2020
Shibaura Mechatronics Corporation
Nobuo Kobayashi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for manufacturing reflective mask and apparatus for manufact...
Patent number
9,513,557
Issue date
Dec 6, 2016
Shibaura Mechatronics Corporation
Katsuhiro Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing reflective mask and apparatus for manufact...
Patent number
8,999,612
Issue date
Apr 7, 2015
Shibaura Mechatronics Corporation
Katsuhiro Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ashing method and ashing device
Patent number
8,524,102
Issue date
Sep 3, 2013
Shibaura Mechatronics Corporation
Katsuhiro Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma processing device and plasma processing method
Patent number
8,088,296
Issue date
Jan 3, 2012
Shibaura Mechatronics Corporation
Katsuhiro Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
Publication number
20240091828
Publication date
Mar 21, 2024
SHIBAURA MECHATRONICS CORPORATION
Junji ISHIHARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210098279
Publication date
Apr 1, 2021
SHIN-ETSU ENGINEERING CO., LTD
Shunya KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170287744
Publication date
Oct 5, 2017
SHIBAURA MECHATRONICS CORPORATION
Nobuo KOBAYASHI
G02 - OPTICS
Information
Patent Application
SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD
Publication number
20170287743
Publication date
Oct 5, 2017
SHIBAURA MECHATRONICS CORPORATION
Nobuo KOBAYASHI
B08 - CLEANING
Information
Patent Application
METHOD FOR MANUFACTURING REFLECTIVE MASK AND APPARATUS FOR MANUFACT...
Publication number
20150177624
Publication date
Jun 25, 2015
SHIBAURA MECHATRONICS CORPORATION
Katsuhiro Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MANUFACTURING REFLECTIVE MASK AND APPARATUS FOR MANUFACT...
Publication number
20130260292
Publication date
Oct 3, 2013
Katsuhiro Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY