Katsuhisa Mita

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for baking photoresist applied on substrate
- Patent number 6,051,371
- Issue date Apr 18, 2000
- Kabushiki Kaisha Toshiba
- Katsuhisa Mita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for baking photoresist applied on substrate
- Patent number 6,033,474
- Issue date Mar 7, 2000
- Kabushiki Kaisha Toshiba
- Katsuhisa Mita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for baking photoresist applied on substrate
- Patent number 5,817,178
- Issue date Oct 6, 1998
- Kabushiki Kaisha Toshiba
- Katsuhisa Mita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY