Katsuhito HIROSE

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system, and ab...
- Patent number 12,087,562
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Kazushi Hikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abnormality detection system and control board
- Patent number 11,873,560
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Katsuhito Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,276,592
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Katsuhito Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus, cleaning method for film forming apparatus...
- Patent number 11,081,322
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Naotaka Noro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition device and deposition method
- Patent number 10,815,567
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 9,725,804
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and process status checking method
- Patent number 9,708,711
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and valve operation checking method
- Patent number 8,834,631
- Issue date Sep 16, 2014
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND AB...
- Publication number 20220251705
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Kazushi HIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20200328100
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABNORMALITY DETECTION SYSTEM AND CONTROL BOARD
- Publication number 20200299841
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...
- Publication number 20180108518
- Publication date Apr 19, 2018
- TOKYO ELECTRON LIMITED
- Naotaka Noro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE AND DEPOSITION METHOD
- Publication number 20170314130
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS
- Publication number 20160047039
- Publication date Feb 18, 2016
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESS STATUS CHECKING METHOD
- Publication number 20130186332
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20130180448
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND VALVE OPERATION CHECKING METHOD
- Publication number 20130183443
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, METHOD OF RECOGNIZING TARG...
- Publication number 20100080444
- Publication date Apr 1, 2010
- TOKYO ELECTRON LIMITED
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Katsuhito HIROSE

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing system, and ab...

Abnormality detection system and control board

Processing apparatus and processing method

Film forming apparatus, cleaning method for film forming apparatus...

Deposition device and deposition method

Processing apparatus

Processing apparatus and process status checking method

Processing apparatus and valve operation checking method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND AB...

PROCESSING APPARATUS AND PROCESSING METHOD

ABNORMALITY DETECTION SYSTEM AND CONTROL BOARD

FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS...

DEPOSITION DEVICE AND DEPOSITION METHOD

PROCESSING APPARATUS

PROCESSING APPARATUS AND PROCESS STATUS CHECKING METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM

PROCESSING APPARATUS AND VALVE OPERATION CHECKING METHOD

PROCESSING APPARATUS, PROCESSING METHOD, METHOD OF RECOGNIZING TARG...