Katsuji Tabara

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Patents Grantslast 30 patents

Information Patent Grant
Pattern data inspection method and storage medium
- Patent number 6,598,185
- Issue date Jul 22, 2003
- Fujitsu Limited
- Showgo Matsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspecting patterns composed of reticle data
- Patent number 5,781,656
- Issue date Jul 14, 1998
- Fujitsu Limited
- Ichiro Hagino
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for checking a mask pattern
- Patent number 5,287,290
- Issue date Feb 15, 1994
- Fujitsu Limited
- Katsuji Tabara
- G06 - COMPUTING CALCULATING COUNTING