Katsumi Asada

Person

Utsunimiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical apparatus, projection optical system, exposure apparatus, a...
- Patent number 9,678,444
- Issue date Jun 13, 2017
- Canon Kabushiki Kaisha
- Katsumi Asada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration control apparatus, lithography apparatus, and method of m...
- Patent number 9,052,614
- Issue date Jun 9, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for moving curved-surface mirror, exposure apparatus and...
- Patent number 7,859,643
- Issue date Dec 28, 2010
- Canon Kabushiki Kaisha
- Katsumi Asada
- G02 - OPTICS
Information Patent Grant
Optical unit and exposure apparatus having the same
- Patent number 7,771,065
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Reflecting mirror and exposure apparatus using the same
- Patent number 7,453,623
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Grant
Optical element holding apparatus, exposure apparatus and device ma...
- Patent number 7,443,619
- Issue date Oct 28, 2008
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Grant
Stage device, exposure apparatus, and device manufacturing method
- Patent number 7,224,432
- Issue date May 29, 2007
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and exposure apparatus using same
- Patent number 5,909,272
- Issue date Jun 1, 1999
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision positioning apparatus
- Patent number 5,511,930
- Issue date Apr 30, 1996
- Canon Kabushiki Kaisha
- Mikio Sato
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage driving system
- Patent number 5,504,407
- Issue date Apr 2, 1996
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...
- Publication number 20150316852
- Publication date Nov 5, 2015
- Canon Kabushiki Kaisha
- Katsumi Asada
- G02 - OPTICS
Information Patent Application
VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...
- Publication number 20120105820
- Publication date May 3, 2012
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACT...
- Publication number 20120045723
- Publication date Feb 23, 2012
- Canon Kabushiki Kaisha
- Ryo NAWATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR MOVING CURVED-SURFACE MIRROR, EXPOSURE APPARATUS AND...
- Publication number 20080100894
- Publication date May 1, 2008
- Canon Kabushiki Kaisha
- Katsumi Asada
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...
- Publication number 20070076310
- Publication date Apr 5, 2007
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Application
Reflecting mirror and exposure apparatus using the same
- Publication number 20060245035
- Publication date Nov 2, 2006
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Application
Optical unit and exposure apparatus having the same
- Publication number 20060232866
- Publication date Oct 19, 2006
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Application
Stage device, exposure apparatus, and device manufacturing method
- Publication number 20050254036
- Publication date Nov 17, 2005
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Katsumi Asada

Person

Patents Grantslast 30 patents

Optical apparatus, projection optical system, exposure apparatus, a...

Vibration control apparatus, lithography apparatus, and method of m...

Apparatus for moving curved-surface mirror, exposure apparatus and...

Optical unit and exposure apparatus having the same

Reflecting mirror and exposure apparatus using the same

Optical element holding apparatus, exposure apparatus and device ma...

Stage device, exposure apparatus, and device manufacturing method

Stage and exposure apparatus using same

Precision positioning apparatus

Stage driving system

Patents Applicationslast 30 patents

OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, A...

VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF M...

VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACT...

APPARATUS FOR MOVING CURVED-SURFACE MIRROR, EXPOSURE APPARATUS AND...

OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...

Reflecting mirror and exposure apparatus using the same

Optical unit and exposure apparatus having the same

Stage device, exposure apparatus, and device manufacturing method