Katsumi Horiguchi

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Amagasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Capacitive coupling plasma processing apparatus
- Patent number 7,767,055
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring for semiconductor treatment and plasma treatment device
- Patent number 7,678,225
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Takaaki Nezu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and apparatus, control program for performing...
- Patent number 7,416,676
- Issue date Aug 26, 2008
- Tokyo Electron Limited
- Jin Fujihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon etching method
- Patent number 7,109,123
- Issue date Sep 19, 2006
- Tokyo Electron Limited
- Takanori Mimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD
- Publication number 20080261406
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Etsuo IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method and apparatus, control program for performing...
- Publication number 20060180571
- Publication date Aug 17, 2006
- TOKYO ELECTRON LIMITED
- Jin Fujihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060118044
- Publication date Jun 8, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method and plasma etching processing apparatus
- Publication number 20050014372
- Publication date Jan 20, 2005
- Satoshi Shimonishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method
- Publication number 20040222190
- Publication date Nov 11, 2004
- TOKYO ELECTRON LIMITED
- Katsumi Horiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon etching method
- Publication number 20040097090
- Publication date May 20, 2004
- Takanori Mimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focus ring for semiconductor treatment and plasma treatment device
- Publication number 20040074605
- Publication date Apr 22, 2004
- Takaaki Nezu
- H01 - BASIC ELECTRIC ELEMENTS