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Katsumi Rikimaru
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Yokohama-shi, JP
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last 30 patents
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Patent Grant
Apparatus and method for evaluating semiconductor material
Patent number
7,145,658
Issue date
Dec 5, 2006
Kabushiki Kaisha Toshiba
Haruko Akutsu
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Apparatus and method for evaluating semiconductor material
Publication number
20040196464
Publication date
Oct 7, 2004
Haruko Akutsu
G01 - MEASURING TESTING