Katsumi TAKASHIMA

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Teaching jig, substrate processing apparatus, and teaching method
- Patent number 10,535,543
- Issue date Jan 14, 2020
- Kokusai Electric Corporation
- Akihito Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of measuring temperature of...
- Patent number 10,340,164
- Issue date Jul 2, 2019
- Hitachi Kokusai Electric, Inc.
- Akihito Watanabe
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TEACHING JIG, SUBSTRATE PROCESSING APPARATUS, AND TEACHING METHOD
- Publication number 20180033666
- Publication date Feb 1, 2018
- Hitachi Kokusai Electric Inc.
- Akihito WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Measuring Temperature of...
- Publication number 20150099235
- Publication date Apr 9, 2015
- Hitachi Kokusai Electric Inc.
- Akihito WATANABE
- G01 - MEASURING TESTING