Katsunobu Nishihara

Person

Suita, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,354,657
- Issue date Jan 15, 2013
- Gigaphoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,928,418
- Issue date Apr 19, 2011
- Gigahoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light and X-ray source target and manufacturing...
- Patent number 7,885,387
- Issue date Feb 8, 2011
- Osaka University
- Keiji Nagai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Patent number 7,521,702
- Issue date Apr 21, 2009
- Osaka University
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
- Publication number 20240094646
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- Katsunobu NISHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
- Publication number 20120241649
- Publication date Sep 27, 2012
- OSAKA UNIVERSITY
- Katsunobu NISHIHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20110163247
- Publication date Jul 7, 2011
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090261277
- Publication date Oct 22, 2009
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme Ultraviolet Light and X-Ray Source Target and Manufacturing...
- Publication number 20080157011
- Publication date Jul 3, 2008
- OSAKA UNIVERSITY
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Publication number 20060133574
- Publication date Jun 22, 2006
- Kansai Technology Licensing Organization Co., Ltd.
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Katsunobu Nishihara

Person

Patents Grantslast 30 patents

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultraviolet light and X-ray source target and manufacturing...

Extreme ultraviolet light source and extreme ultraviolet light sour...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

Extreme ultra violet light source apparatus

Extreme Ultraviolet Light and X-Ray Source Target and Manufacturing...

Extreme ultraviolet light source and extreme ultraviolet light sour...