Katsunori Hirai

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dechuck control method and plasma processing apparatus
- Patent number 11,037,815
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic attraction method
- Patent number 10,832,930
- Issue date Nov 10, 2020
- Tokyo Electron Limited
- Katsunori Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,082,720
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Kazuto Ogawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DECHUCK CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190074209
- Publication date Mar 7, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC ATTRACTION METHOD
- Publication number 20180366360
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Katsunori HIRAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150056817
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Kazuto Ogawa
- H01 - BASIC ELECTRIC ELEMENTS