Katsunori Ichino

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, control method, and computer-readab...
- Patent number 12,094,737
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Masayuki Kajiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,587,805
- Issue date Feb 21, 2023
- Tokyo Electron Limited
- Tomoki Okazawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Treatment solution supply apparatus and substrate treatment system
- Patent number 10,807,027
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Cover plate for wind mark control in spin coating process
- Patent number 10,262,880
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Derek W. Bassett
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid coating method, liquid coating apparatus, and computer-reada...
- Patent number 10,201,826
- Issue date Feb 12, 2019
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 10,022,652
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,878,267
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,731,226
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus, coating film forming method, and re...
- Patent number 9,613,836
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating treatment method
- Patent number 9,165,763
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment method, non-transitory computer storage medium an...
- Patent number 8,691,336
- Issue date Apr 8, 2014
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating treatment method, computer storage medium, and coating trea...
- Patent number 8,501,274
- Issue date Aug 6, 2013
- Tokyo Electron Limited
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating method
- Patent number 8,304,018
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Koji Takayanagi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
- Publication number 20240094644
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Makoto OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READAB...
- Publication number 20210020464
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Masayuki KAJIWARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200395227
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tomoki OKAZAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20190076763
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20180093205
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20170296944
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID COATING METHOD, LIQUID COATING APPARATUS, AND COMPUTER-READA...
- Publication number 20150352587
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Katsunori Ichino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RE...
- Publication number 20150004311
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20150000517
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS
- Publication number 20140235070
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Derek W. Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20130295777
- Publication date Nov 7, 2013
- Katsunori ICHINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20110312190
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AN...
- Publication number 20110250765
- Publication date Oct 13, 2011
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20110052807
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Katsunori Ichino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD
- Publication number 20100209607
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND COA...
- Publication number 20090291198
- Publication date Nov 26, 2009
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Katsunori Ichino

Person

Patents Grantslast 30 patents

Substrate processing apparatus, control method, and computer-readab...

Substrate processing apparatus and substrate processing method

Treatment solution supply apparatus and substrate treatment system

Cover plate for wind mark control in spin coating process

Liquid coating method, liquid coating apparatus, and computer-reada...

Solution treatment apparatus and solution treatment method

Solution treatment apparatus and solution treatment method

Solution treatment apparatus and solution treatment method

Coating film forming apparatus, coating film forming method, and re...

Coating treatment method

Coating treatment method, non-transitory computer storage medium an...

Coating treatment method, computer storage medium, and coating trea...

Coating method

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD, AND COMPUTER-READAB...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TREATMENT SOLUTION SUPPLY APPARATUS AND SUBSTRATE TREATMENT SYSTEM

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

LIQUID COATING METHOD, LIQUID COATING APPARATUS, AND COMPUTER-READA...

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND RE...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

COATING METHOD AND COATING APPARATUS

COATING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AN...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

COATING METHOD

COATING TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND COA...