Katsunori Onuki

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam device
- Patent number 11,515,121
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate for evaluation and method using same to eva...
- Patent number 11,193,895
- Issue date Dec 7, 2021
- HITACHI HIGH-TECH CORPORATION
- Kentaro Ohira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 11,107,655
- Issue date Aug 31, 2021
- Hitachi High-Technologies Corporation
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 11,002,687
- Issue date May 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Masaki Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, and method of adjusting charged pa...
- Patent number 10,923,315
- Issue date Feb 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Masaki Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and method for adjusting charged parti...
- Patent number 10,522,320
- Issue date Dec 31, 2019
- Hitachi High-Technologies Corporation
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive interface system between vacuum chambers in a charged pa...
- Patent number 10,290,522
- Issue date May 14, 2019
- Hitachi High-Technologies Corporation
- Masashi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and vibration damper for charged pa...
- Patent number 10,056,226
- Issue date Aug 21, 2018
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam device with focus adjustment based on accele...
- Patent number 9,644,955
- Issue date May 9, 2017
- Hitachi High-Technologies Corporation
- Tasuku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device
- Patent number 8,629,410
- Issue date Jan 14, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Tsuji
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exhaust apparatus and control method for same, and vacuum-use hydro...
- Patent number 7,284,906
- Issue date Oct 23, 2007
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
MIRROR ELECTRONIC INSPECTION DEVICE
- Publication number 20210313138
- Publication date Oct 7, 2021
- HITACHI HIGH-TECH CORPORATION
- Masahiro YAMAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Substrate for Evaluation and Method Using Same to Eva...
- Publication number 20200340930
- Publication date Oct 29, 2020
- Hitachi High-Tech Corporation
- Kentaro OHIRA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Method and Defect Inspection Device
- Publication number 20200292466
- Publication date Sep 17, 2020
- Hitachi High-Technologies Corporation
- Masaki HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20200279714
- Publication date Sep 3, 2020
- Hitachi High-Technologies Corporation
- Tomohiko OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Device
- Publication number 20200152415
- Publication date May 14, 2020
- Hitachi High-Technologies Corporation
- Tomohiko OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus, and Method of Adjusting Charged Pa...
- Publication number 20190378685
- Publication date Dec 12, 2019
- Hitachi High-Technologies Corporation
- Masaki HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Method for Adjusting Charged Parti...
- Publication number 20190108969
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Tomohiko OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defect Inspection Device
- Publication number 20190079025
- Publication date Mar 14, 2019
- Masaki HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...
- Publication number 20170250054
- Publication date Aug 31, 2017
- Hitachi High-Technologies Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160133433
- Publication date May 12, 2016
- Hitachi High-Technologies Corporation
- Masashi FUJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON BEAM DEVICE AND DIMENSION MEASUREMENT METHOD USIN...
- Publication number 20140339425
- Publication date Nov 20, 2014
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140042338
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Nobuo Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device
- Publication number 20120145920
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE
- Publication number 20120091362
- Publication date Apr 19, 2012
- Hitachi High-Technologies Corporation
- Hiroshi Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exhaust apparatus and control method for same, and vacuum-use hydro...
- Publication number 20030141667
- Publication date Jul 31, 2003
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Katsunori Onuki

Person

Patents Grantslast 30 patents

Electron beam device

Semiconductor substrate for evaluation and method using same to eva...

Charged particle beam device

Defect inspection method and defect inspection device

Charged particle beam apparatus, and method of adjusting charged pa...

Charged particle beam device and method for adjusting charged parti...

Conductive interface system between vacuum chambers in a charged pa...

Charged particle beam apparatus and vibration damper for charged pa...

Scanning electron beam device with focus adjustment based on accele...

Stage device

Charged particle radiation device

Exhaust apparatus and control method for same, and vacuum-use hydro...

Patents Applicationslast 30 patents

MIRROR ELECTRONIC INSPECTION DEVICE

Semiconductor Substrate for Evaluation and Method Using Same to Eva...

Defect Inspection Method and Defect Inspection Device

Charged Particle Beam Device

Electron Beam Device

Charged Particle Beam Apparatus, and Method of Adjusting Charged Pa...

Charged Particle Beam Device and Method for Adjusting Charged Parti...

Defect Inspection Device

CHARGED PARTICLE BEAM APPARATUS AND VIBRATION DAMPER FOR CHARGED PA...

Charged Particle Beam Device

SCANNING ELECTRON BEAM DEVICE AND DIMENSION MEASUREMENT METHOD USIN...

STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS

Stage Device

CHARGED PARTICLE RADIATION DEVICE

Exhaust apparatus and control method for same, and vacuum-use hydro...