Katsuo Nishi

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Patents Grantslast 30 patents

Information Patent Grant
Support boat for objects to be processed
- Patent number 5,897,311
- Issue date Apr 27, 1999
- Tokyo Electron Limited
- Katsuo Nishi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for controlling temperature in rapid heat trea...
- Patent number 5,616,264
- Issue date Apr 1, 1997
- Tokyo Electron Limited
- Katsuo Nishi
- C30 - CRYSTAL GROWTH