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Katsuo Oshima
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Mask pattern correction method
Patent number
6,869,738
Issue date
Mar 22, 2005
Oki Electric Industry Co., Ltd.
Katsuo Oshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing baking treatment to semiconduct...
Patent number
6,838,643
Issue date
Jan 4, 2005
Oki Electric Industry Co., Ltd.
Shouzou Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication method for a semiconductor device
Patent number
6,455,438
Issue date
Sep 24, 2002
Oki Electric Industry Co., Ltd.
Azusa Yanagisawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Mask pattern correction method
Publication number
20030162103
Publication date
Aug 28, 2003
Katsuo Oshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for performing baking treatment to semiconduct...
Publication number
20030057198
Publication date
Mar 27, 2003
Shouzou Kobayashi
H01 - BASIC ELECTRIC ELEMENTS