Katsuro WAKASUGI

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning semiconductor wafer and manufacturing method of...
- Patent number 11,114,317
- Issue date Sep 7, 2021
- Sumco Corporation
- Katsuro Wakasugi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER STORAGE CONTAINER CLEANING APPARATUS, AND WAFER STORAGE CONTA...
- Publication number 20240128095
- Publication date Apr 18, 2024
- SUMCO CORPORATION
- Fumitoshi IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING WORK AND CLEANING SYSTEM FOR WORK
- Publication number 20230271229
- Publication date Aug 31, 2023
- SUMCO CORPORATION
- Kaito NODA
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER AND MANUFACTURING METHOD OF...
- Publication number 20200020552
- Publication date Jan 16, 2020
- SUMCO CORPORATION
- Katsuro WAKASUGI
- H01 - BASIC ELECTRIC ELEMENTS