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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Workpiece placement apparatus and processing apparatus
Patent number
11,942,357
Issue date
Mar 26, 2024
Tokyo Electron Limited
Yohei Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece placement apparatus and processing apparatus
Patent number
11,410,871
Issue date
Aug 9, 2022
Tokyo Electron Limited
Yohei Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle collecting apparatus and particle collecting system
Patent number
10,768,089
Issue date
Sep 8, 2020
Tokyo Electron Limited
Toshihiko Kikuchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
Publication number
20220336257
Publication date
Oct 20, 2022
TOKYO ELECTRON LIMITED
Yohei UCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPIECE PLACEMENT APPARATUS AND PROCESSING APPARATUS
Publication number
20190279894
Publication date
Sep 12, 2019
TOKYO ELECTRON LIMITED
Yohei UCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE COLLECTING APPARATUS, PARTICLE COLLECTING METHOD, AND PART...
Publication number
20180095021
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Toshihiko KIKUCHI
G01 - MEASURING TESTING