Katsushi Nakano

Person

Kumagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Information calculation method, exposure apparatus, exposure method...
- Patent number 11,360,394
- Issue date Jun 14, 2022
- Nikon Corporation
- Mineyuki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information calculation method, exposure apparatus, exposure method...
- Patent number 10,942,457
- Issue date Mar 9, 2021
- Nikon Corporation
- Mineyuki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information calculation method, exposure apparatus, exposure method...
- Patent number 10,642,159
- Issue date May 5, 2020
- Nikon Corporation
- Mineyuki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information calculation method, exposure apparatus, exposure method...
- Patent number 10,317,803
- Issue date Jun 11, 2019
- Nikon Corporation
- Mineyuki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, exposure apparatus maintenance...
- Patent number 10,061,214
- Issue date Aug 28, 2018
- Nikon Corporation
- Natsuko Sagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,746,781
- Issue date Aug 29, 2017
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Information calculation method, exposure apparatus, exposure method...
- Patent number 9,720,332
- Issue date Aug 1, 2017
- Nikon Corporation
- Mineyuki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus rinsing outer contour of substrate...
- Patent number 8,941,808
- Issue date Jan 27, 2015
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,780,327
- Issue date Jul 15, 2014
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,760,617
- Issue date Jun 24, 2014
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, maintenance method and device manufa...
- Patent number 8,514,366
- Issue date Aug 20, 2013
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,384,877
- Issue date Feb 26, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,305,553
- Issue date Nov 6, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, device manufacturing method, and substrate
- Patent number 8,294,873
- Issue date Oct 23, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus and device manufacturing method
- Patent number 8,253,924
- Issue date Aug 28, 2012
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,174,668
- Issue date May 8, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,169,592
- Issue date May 1, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,130,363
- Issue date Mar 6, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Analysis method, exposure method, and device manufacturing method
- Patent number 8,111,374
- Issue date Feb 7, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,072,576
- Issue date Dec 6, 2011
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Linear motor, stage apparatus and exposure apparatus
- Patent number 8,053,937
- Issue date Nov 8, 2011
- Nikon Corporation
- Katsushi Nakano
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate processing method, exposure apparatus, and method for pro...
- Patent number 8,040,489
- Issue date Oct 18, 2011
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,004,653
- Issue date Aug 23, 2011
- Nikon Corporation
- Naoyuki Kobayashi
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,995,187
- Issue date Aug 9, 2011
- Naoyuki Kobayashi
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,388,649
- Issue date Jun 17, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Low-aberration deflectors for use in charged-particle-beam optical...
- Patent number 6,802,986
- Issue date Oct 12, 2004
- Nikon Corporation
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow-beam apertures for charged-particle-beam microlithography ap...
- Patent number 6,635,891
- Issue date Oct 21, 2003
- Nikon Corporation
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam optical components and systems including ferr...
- Patent number 6,566,663
- Issue date May 20, 2003
- Nikon Corporation
- Koichi Kamijo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Probe needle arrangement and movement method for use in an atomic f...
- Patent number 6,223,591
- Issue date May 1, 2001
- Nikon Corporation
- Katsushi Nakano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope having cantilever attached to driving member
- Patent number 6,018,991
- Issue date Feb 1, 2000
- Nikon Corporation
- Katsushi Nakano
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...
- Publication number 20210191277
- Publication date Jun 24, 2021
- Nikon Corporation
- Mineyuki NISHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...
- Publication number 20200264519
- Publication date Aug 20, 2020
- Nikon Corporation
- Mineyuki NISHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
- Publication number 20180364597
- Publication date Dec 20, 2018
- Nikon Corporation
- Natsuko YAMAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20180292759
- Publication date Oct 11, 2018
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20170329239
- Publication date Nov 16, 2017
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...
- Publication number 20170307984
- Publication date Oct 26, 2017
- Nikon Corporation
- Mineyuki NISHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20160231653
- Publication date Aug 11, 2016
- Nikon Corporation
- Hiroyuki NAGASAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...
- Publication number 20140362354
- Publication date Dec 11, 2014
- Mineyuki NISHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20140307238
- Publication date Oct 16, 2014
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD AND APPARATUS, MAINTENANCE METHOD AND DEVICE MANUFA...
- Publication number 20130301019
- Publication date Nov 14, 2013
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, MAINTENANCE METHOD, AND DEV...
- Publication number 20130278908
- Publication date Oct 24, 2013
- Yoshitomo NAGAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20130169945
- Publication date Jul 4, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
- Publication number 20120314193
- Publication date Dec 13, 2012
- Nikon Corporation
- Natsuko Sagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...
- Publication number 20120094238
- Publication date Apr 19, 2012
- Nikon Corporation
- Hiroyuki NAGASAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20120008112
- Publication date Jan 12, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20110199594
- Publication date Aug 18, 2011
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposing method, and device fabricating method
- Publication number 20100283979
- Publication date Nov 11, 2010
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, maintaining method and device fabricating method
- Publication number 20100045949
- Publication date Feb 25, 2010
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20090262316
- Publication date Oct 22, 2009
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method, and Device Manufacturing Method
- Publication number 20090226846
- Publication date Sep 10, 2009
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus, maintenance method and device manufa...
- Publication number 20090066922
- Publication date Mar 12, 2009
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus, maintenance method, and device manuf...
- Publication number 20090061331
- Publication date Mar 5, 2009
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, substrate processing method, and device produci...
- Publication number 20090033890
- Publication date Feb 5, 2009
- Nikon Corporation
- Tomoharu Fujiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear Motor, Stage Apparatus and Exposure Apparatus
- Publication number 20080265688
- Publication date Oct 30, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20080246931
- Publication date Oct 9, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and method for producing device
- Publication number 20080231825
- Publication date Sep 25, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080225249
- Publication date Sep 18, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080225250
- Publication date Sep 18, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Method, Exposure Apparatus and Device Manufacturing Method
- Publication number 20080218714
- Publication date Sep 11, 2008
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposing method, exposure apparatus, device fabricating method, and...
- Publication number 20080204687
- Publication date Aug 28, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Katsushi Nakano

Person

Patents Grantslast 30 patents

Information calculation method, exposure apparatus, exposure method...

Information calculation method, exposure apparatus, exposure method...

Information calculation method, exposure apparatus, exposure method...

Information calculation method, exposure apparatus, exposure method...

Exposure apparatus, exposure method, exposure apparatus maintenance...

Exposure apparatus and method for producing device

Information calculation method, exposure apparatus, exposure method...

Immersion lithographic apparatus rinsing outer contour of substrate...

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure method and apparatus, maintenance method and device manufa...

Exposure apparatus and method for producing device

Exposure apparatus and device manufacturing method

Exposure method, device manufacturing method, and substrate

Exposure method, exposure apparatus and device manufacturing method

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Analysis method, exposure method, and device manufacturing method

Exposure apparatus and method for producing device

Linear motor, stage apparatus and exposure apparatus

Substrate processing method, exposure apparatus, and method for pro...

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Low-aberration deflectors for use in charged-particle-beam optical...

Hollow-beam apertures for charged-particle-beam microlithography ap...

Charged-particle-beam optical components and systems including ferr...

Probe needle arrangement and movement method for use in an atomic f...

Scanning probe microscope having cantilever attached to driving member

Patents Applicationslast 30 patents

INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...

INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...

EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE METHOD AND APPARATUS, MAINTENANCE METHOD AND DEVICE MANUFA...

EXPOSURE APPARATUS AND EXPOSURE METHOD, MAINTENANCE METHOD, AND DEV...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...

SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTUR...

Substrate processing method, exposure apparatus, and method for pro...

Exposure apparatus and method for producing device

Exposure apparatus, exposing method, and device fabricating method

Exposure apparatus, maintaining method and device fabricating method

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

Exposure Apparatus, Exposure Method, and Device Manufacturing Method

Exposure method and apparatus, maintenance method and device manufa...

Exposure method and apparatus, maintenance method, and device manuf...

Exposure apparatus, substrate processing method, and device produci...

Linear Motor, Stage Apparatus and Exposure Apparatus

Substrate processing method, exposure apparatus, and method for pro...

Exposure Apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure Method, Exposure Apparatus and Device Manufacturing Method

Exposing method, exposure apparatus, device fabricating method, and...