Katsushige Harada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Metal contamination prevention method and apparatus, and substrate...
- Patent number 11,486,043
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming thin film
- Patent number 9,574,269
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Katsushige Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,293,543
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Shuji Azumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of forming metal compound film, and electronic...
- Patent number 9,234,275
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating semiconductor device and the semiconductor d...
- Patent number 9,230,799
- Issue date Jan 5, 2016
- Tohoku University
- Akinobu Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing capacitor, capacitor and method of forming...
- Patent number 8,896,097
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing method, recording medium having recorded program...
- Patent number 8,815,112
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming titanium nitride film
- Patent number 8,642,127
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,389,421
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Katsushige Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 8,336,487
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 7,968,472
- Issue date Jun 28, 2011
- Tokyo Electron Limited
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,368,384
- Issue date May 6, 2008
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for depositing a plurality of high-k dielectric...
- Patent number 7,041,546
- Issue date May 9, 2006
- Tokyo Electron Limited
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Metal Contamination Prevention Method and Apparatus, and Substrate...
- Publication number 20200040463
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING THIN FILM
- Publication number 20160281224
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Katsushige HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING TiSiN FILM
- Publication number 20150279683
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Katsushige HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...
- Publication number 20140367699
- Publication date Dec 18, 2014
- TOHOKU UNIVERSITY
- Akinobu TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF FORMING METAL COMPOUND FILM, AND ELECTRONIC...
- Publication number 20140161706
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20140094027
- Publication date Apr 3, 2014
- OSAKA UNIVERSITY
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...
- Publication number 20130292700
- Publication date Nov 7, 2013
- TOHOKU UNIVERSITY
- Akinobu Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING CAPACITOR, CAPACITOR AND METHOD OF FORMING...
- Publication number 20130200491
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...
- Publication number 20120219710
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid Processing Method, Recording Medium Having Recorded Program...
- Publication number 20120067846
- Publication date Mar 22, 2012
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110300719
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Katsushige HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20110197813
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORM...
- Publication number 20100186667
- Publication date Jul 29, 2010
- TOKYO ELECTRON LIMITED
- Katsutoshi ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20100035439
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Yoshihiro Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20050245099
- Publication date Nov 3, 2005
- Atsushi Endo
- B08 - CLEANING
Information Patent Application
Capacitor structure and film forming method and apparatus
- Publication number 20040195653
- Publication date Oct 7, 2004
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS

Katsushige Harada

Person

Patents Grantslast 30 patents

Metal contamination prevention method and apparatus, and substrate...

Method and apparatus for forming thin film

Film forming method and film forming apparatus

Method and apparatus of forming metal compound film, and electronic...

Method for fabricating semiconductor device and the semiconductor d...

Method of manufacturing capacitor, capacitor and method of forming...

Liquid processing method, recording medium having recorded program...

Method of forming titanium nitride film

Film formation method and film formation apparatus

Film forming apparatus

Film forming method and film forming apparatus

Film formation apparatus and method of using the same

Film forming method for depositing a plurality of high-k dielectric...

Patents Applicationslast 30 patents

Metal Contamination Prevention Method and Apparatus, and Substrate...

METHOD AND APPARATUS FOR FORMING THIN FILM

METHOD AND APPARATUS FOR FORMING TiSiN FILM

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...

METHOD AND APPARATUS OF FORMING METAL COMPOUND FILM, AND ELECTRONIC...

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR D...

METHOD OF MANUFACTURING CAPACITOR, CAPACITOR AND METHOD OF FORMING...

METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...

Liquid Processing Method, Recording Medium Having Recorded Program...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

FILM FORMING APPARATUS

VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORM...

FILM FORMING METHOD AND FILM FORMING APPARATUS

Film formation apparatus and method of using the same

Capacitor structure and film forming method and apparatus