Katsutomo Terashima

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Oyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Excimer laser device and gas for excimer laser
- Patent number 7,006,548
- Issue date Feb 28, 2006
- Komatsu Ltd.
- Katsutomo Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arf excimer laser device, scanning type exposure device and ultravi...
- Patent number 6,819,699
- Issue date Nov 16, 2004
- Komatsu Ltd.
- Tatsuo Enami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet laser apparatus and gas for ultraviolet laser
- Patent number 6,496,527
- Issue date Dec 17, 2002
- Komatsu, Ltd.
- Katsutomo Terashima
- H01 - BASIC ELECTRIC ELEMENTS