TREA

Katsuya Fukae

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  • Gunma, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method or dry cleaning method
    • Patent number 11,814,726
    • Issue date Nov 14, 2023
    • Kanto Denka Kogyo Co., Ltd.
    • Yoshinao Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dry etching method or dry cleaning method
    • Patent number 11,584,989
    • Issue date Feb 21, 2023
    • Kanto Denka Kogyo Co., Ltd.
    • Yoshinao Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer etching using acid halide
    • Patent number 11,183,393
    • Issue date Nov 23, 2021
    • Kanto Denka Kogyo Co., Ltd.
    • Korehito Kato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processes and equipments for preparing F2-containing gases, as well...
    • Patent number 7,919,141
    • Issue date Apr 5, 2011
    • Kanto Denka Kogyo Co., Ltd.
    • Takashi Tanioka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cleaning gases and etching gases
    • Patent number 6,787,053
    • Issue date Sep 7, 2004
    • Asahi Glass Company, Limited
    • Akira Sekiya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents