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Katsuya Machino
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Yotsukaido-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Scanning exposure method and system
Patent number
6,873,400
Issue date
Mar 29, 2005
Nikon Corporation
Masaichi Murakami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure method and exposure apparatus and mask
Patent number
6,506,544
Issue date
Jan 14, 2003
Nikon Corporation
Kazuhiko Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Scanning exposure method and system
Publication number
20010052966
Publication date
Dec 20, 2001
Seiji Fujitsuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY