Katsuya OKUMURA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature control unit and temperature control device
- Patent number 12,298,083
- Issue date May 13, 2025
- TOMOEGAWA CORPORATION
- Shuhei Hatano
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Micromixer
- Patent number 12,280,346
- Issue date Apr 22, 2025
- CKD Corporation
- Shinichi Nitta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Heat storage unit
- Patent number 12,104,857
- Issue date Oct 1, 2024
- Tomoegawa Co., Ltd.
- Katsuya Okumura
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Seal material for analyzer, and flow cell, detector, and analyzer u...
- Patent number 12,098,998
- Issue date Sep 24, 2024
- Tomoegawa Co., Ltd.
- Minoru Tsuchida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Self-heating sheet-like material for moisture absorption and desorp...
- Patent number 11,291,945
- Issue date Apr 5, 2022
- Tomoegawa Co., Ltd.
- Katsuya Okumura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Cushion paper
- Patent number 10,988,876
- Issue date Apr 27, 2021
- Tomoegawa Co., Ltd.
- Katsuya Okumura
- D10 - INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEX...
Information Patent Grant
Resistor element
- Patent number 10,636,551
- Issue date Apr 28, 2020
- Tomoegawa Co., Ltd.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,153,181
- Issue date Dec 11, 2018
- SCREEN Holdings Co., Ltd.
- Yuta Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device having a voltage resis...
- Patent number 10,109,501
- Issue date Oct 23, 2018
- Fuji Electric Co., Ltd.
- Koh Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle chuck cleaner
- Patent number 9,884,350
- Issue date Feb 6, 2018
- TOSHIBA MEMORY CORPORATION
- Masamitsu Itoh
- B08 - CLEANING
Information Patent Grant
Semiconductor device having a voltage resistant structure
- Patent number 9,786,749
- Issue date Oct 10, 2017
- Fuji Electric Co., Ltd.
- Koh Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle chuck cleaner
- Patent number 9,034,467
- Issue date May 19, 2015
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- B08 - CLEANING
Information Patent Grant
Semiconductor device
- Patent number 9,035,453
- Issue date May 19, 2015
- Octec, Inc.
- Katsuya Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for inspecting sample surface
- Patent number 8,859,984
- Issue date Oct 14, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device and the method for manufacturing the same
- Patent number 8,531,007
- Issue date Sep 10, 2013
- Octec, Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting sample surface
- Patent number 8,525,127
- Issue date Sep 3, 2013
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Target for X-ray generation, X-ray generator, and method for produc...
- Patent number 8,416,920
- Issue date Apr 9, 2013
- Tokyo Electron Limited
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder, sample suction device using the same, and sample pro...
- Patent number 8,347,744
- Issue date Jan 8, 2013
- Kyocera Corporation
- Takeshi Muneishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, electrode member and electrode member fabrica...
- Patent number 8,324,726
- Issue date Dec 4, 2012
- Octec, Inc.
- Katsuya Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multichip semiconductor device, chip therefor and method of formati...
- Patent number 8,283,755
- Issue date Oct 9, 2012
- Kabushiki Kaisha Toshiba
- Nobuo Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor and manufacturing method thereof
- Patent number 8,247,289
- Issue date Aug 21, 2012
- Ibiden Co., Ltd.
- Yoshiki Yamanishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multichip semiconductor device, chip therefor and method of formati...
- Patent number 8,174,093
- Issue date May 8, 2012
- Kabushiki Kaisha Toshiba
- Nobuo Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, pattern forming method...
- Patent number 8,071,157
- Issue date Dec 6, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 8,021,062
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takanori Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Switch array
- Patent number 7,994,443
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Masato Hayashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chemical liquid supply system
- Patent number 7,988,429
- Issue date Aug 2, 2011
- Octec Inc.
- Katsuya Okumura
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Substrate holding apparatus, substrate transferring robot equipped...
- Patent number 7,980,611
- Issue date Jul 19, 2011
- Kabushiki Kaisha Yaskawa Denki
- Hideharu Zenpo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting sample surface
- Patent number 7,952,071
- Issue date May 31, 2011
- Ebara Corporation
- Nobuharu Noji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pump for supplying chemical liquids
- Patent number 7,942,647
- Issue date May 17, 2011
- Octec Inc.
- Katsuya Okumura
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Plasma processing apparatus, electrode plate for plasma processing...
- Patent number 7,922,862
- Issue date Apr 12, 2011
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROMIXER
- Publication number 20220314177
- Publication date Oct 6, 2022
- CKD CORPORATION
- Shinichi Nitta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
HEAT STORAGE UNIT
- Publication number 20220187026
- Publication date Jun 16, 2022
- TOMOEGAWA CO., LTD.
- Katsuya OKUMURA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SEAL MATERIAL FOR ANALYZER, AND FLOW CELL, DETECTOR, AND ANALYZER U...
- Publication number 20220026345
- Publication date Jan 27, 2022
- TOMOEGAWA CO., LTD.
- Minoru TSUCHIDA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPERATURE CONTROL UNIT AND TEMPERATURE CONTROL DEVICE
- Publication number 20220026162
- Publication date Jan 27, 2022
- TOMOEGAWA CO., LTD.
- Shuhei Hatano
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
CUSHION PAPER
- Publication number 20200063302
- Publication date Feb 27, 2020
- TOMOEGAWA CO., LTD.
- Katsuya Okumura
- D10 - INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEX...
Information Patent Application
RESISTOR ELEMENT
- Publication number 20190348200
- Publication date Nov 14, 2019
- TOMOEGAWA CO., LTD.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-HEATING SHEET-LIKE MATERIAL FOR MOISTURE ABSORPTION AND DESORP...
- Publication number 20190308132
- Publication date Oct 10, 2019
- TOMOEGAWA CO., LTD.
- Katsuya Okumura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COPPER FIBER NONWOVEN FABRIC
- Publication number 20190257014
- Publication date Aug 22, 2019
- TOMOEGAWA CO., LTD.
- Katsuya Okumura
- D10 - INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEX...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20180006125
- Publication date Jan 4, 2018
- Fuji Electric Co., Ltd.
- Koh YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20170148882
- Publication date May 25, 2017
- Fuji Electric Co., Ltd.
- Koh YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CHUCK CLEANER
- Publication number 20150190851
- Publication date Jul 9, 2015
- Kabushiki Kaisha Toshiba
- Masamitsu ITOH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20130313429
- Publication date Nov 28, 2013
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE, ELECTRODE MEMBER, AND ELECTRODE MEMBER FABRIC...
- Publication number 20130093082
- Publication date Apr 18, 2013
- Octec, Inc.
- Katsuya OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20120244697
- Publication date Sep 27, 2012
- Octec, Inc.
- Katsuya Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE
- Publication number 20120145921
- Publication date Jun 14, 2012
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
RETICLE CHUCK CLEANER
- Publication number 20120024318
- Publication date Feb 2, 2012
- Masamitsu ITOH
- B08 - CLEANING
Information Patent Application
Multichip semiconductor device, chip therefor and method of formati...
- Publication number 20110215443
- Publication date Sep 8, 2011
- Kabushiki Kaisha Toshiba
- Nobuo Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110212255
- Publication date Sep 1, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...
- Publication number 20110162802
- Publication date Jul 7, 2011
- Katsuya OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multichip semiconductor device, chip therefor and method of formati...
- Publication number 20110101522
- Publication date May 5, 2011
- Kabushiki Kaisha Toshiba
- Nobuo Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET FOR X-RAY GENERATION, X-RAY GENERATOR, AND METHOD FOR PRODUC...
- Publication number 20110058655
- Publication date Mar 10, 2011
- TOKYO ELECTRON LIMITED
- Katsuya OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND THE METHOD FOR MANUFACTURING THE SAME
- Publication number 20110006403
- Publication date Jan 13, 2011
- FUJI ELECTRIC SYSTEMS CO. LTD.
- Katsuya OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...
- Publication number 20110008545
- Publication date Jan 13, 2011
- Kabushiki Kaisha Toshiba
- Shinichi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ENCODER APPARATUS AND MANUFACTURING METHOD THEREFOR
- Publication number 20100315073
- Publication date Dec 16, 2010
- Kabushiki Kaisha Yaskawa Denki
- Yuji Arinaga
- G01 - MEASURING TESTING
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20100216077
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Takanori NISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SAMPLE HOLDING TOOL, SAMPLE SUCTION DEVICE USING THE SAME AND SAMPL...
- Publication number 20100144147
- Publication date Jun 10, 2010
- KYOCERA CORPORATION
- Takeshi Muneishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHROMATOGRAPHY COLUMN AND MANUFACTURING METHOD OF THE SAME
- Publication number 20100032357
- Publication date Feb 11, 2010
- TOKYO ELECTRON LIMITED
- Tomofumi Kiyomoto
- G01 - MEASURING TESTING
Information Patent Application
Sample Holder, Sample Suction Device Using the Same, and Sample Pro...
- Publication number 20090293647
- Publication date Dec 3, 2009
- Kyocera Corporation
- Takeshi Muneishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...
- Publication number 20090285998
- Publication date Nov 19, 2009
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE TRANSFERRING ROBOT EQUIPPED...
- Publication number 20090232631
- Publication date Sep 17, 2009
- KABUSHIKI KAISHA YASKAWA DENKI
- Hideharu Zenpo
- H01 - BASIC ELECTRIC ELEMENTS

Katsuya OKUMURA

Person

Patents Grantslast 30 patents

Temperature control unit and temperature control device

Micromixer

Heat storage unit

Seal material for analyzer, and flow cell, detector, and analyzer u...

Self-heating sheet-like material for moisture absorption and desorp...

Cushion paper

Resistor element

Substrate treating apparatus and substrate treating method

Manufacturing method of semiconductor device having a voltage resis...

Reticle chuck cleaner

Semiconductor device having a voltage resistant structure

Reticle chuck cleaner

Semiconductor device

Method and apparatus for inspecting sample surface

Semiconductor device and the method for manufacturing the same

Method and apparatus for inspecting sample surface

Target for X-ray generation, X-ray generator, and method for produc...

Sample holder, sample suction device using the same, and sample pro...

Semiconductor device, electrode member and electrode member fabrica...

Multichip semiconductor device, chip therefor and method of formati...

Capacitor and manufacturing method thereof

Multichip semiconductor device, chip therefor and method of formati...

Film forming method, film forming apparatus, pattern forming method...

Developing apparatus and developing method

Switch array

Chemical liquid supply system

Substrate holding apparatus, substrate transferring robot equipped...

Apparatus and method for inspecting sample surface

Pump for supplying chemical liquids

Plasma processing apparatus, electrode plate for plasma processing...

Patents Applicationslast 30 patents

MICROMIXER

HEAT STORAGE UNIT

SEAL MATERIAL FOR ANALYZER, AND FLOW CELL, DETECTOR, AND ANALYZER U...

TEMPERATURE CONTROL UNIT AND TEMPERATURE CONTROL DEVICE

CUSHION PAPER

RESISTOR ELEMENT

SELF-HEATING SHEET-LIKE MATERIAL FOR MOISTURE ABSORPTION AND DESORP...

COPPER FIBER NONWOVEN FABRIC

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

RETICLE CHUCK CLEANER

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

SEMICONDUCTOR DEVICE, ELECTRODE MEMBER, AND ELECTRODE MEMBER FABRIC...

METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR INSPECTING SAMPLE SURFACE

RETICLE CHUCK CLEANER

Multichip semiconductor device, chip therefor and method of formati...

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...

Multichip semiconductor device, chip therefor and method of formati...

TARGET FOR X-RAY GENERATION, X-RAY GENERATOR, AND METHOD FOR PRODUC...

SEMICONDUCTOR DEVICE AND THE METHOD FOR MANUFACTURING THE SAME

FILM FORMING METHOD, FILM FORMING APPARATUS, PATTERN FORMING METHOD...

MAGNETIC ENCODER APPARATUS AND MANUFACTURING METHOD THEREFOR

DEVELOPING APPARATUS AND DEVELOPING METHOD

SAMPLE HOLDING TOOL, SAMPLE SUCTION DEVICE USING THE SAME AND SAMPL...

CHROMATOGRAPHY COLUMN AND MANUFACTURING METHOD OF THE SAME

Sample Holder, Sample Suction Device Using the Same, and Sample Pro...

PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE TRANSFERRING ROBOT EQUIPPED...