Katsuya Toba

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Oshu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Loading unit and processing system
- Patent number 9,230,843
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Katsuya Toba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical thermal processing apparatus and substrate supporter
- Patent number 8,940,096
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Satoshi Asari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical heat treating equipment
- Patent number 6,957,956
- Issue date Oct 25, 2005
- Tokyo Electron Limited
- Katsuya Toba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOADING UNIT AND PROCESSING SYSTEM
- Publication number 20120269603
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Katsuya TOBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT INSTRUMENT, AND VERTICAL HEAT TREATMENT APPARATUS...
- Publication number 20120258414
- Publication date Oct 11, 2012
- TOKYO ELECTRON LIMITED
- Hiroyuki MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL THERMAL PROCESSING APPARATUS AND SUBSTRATE SUPPORTER
- Publication number 20100058982
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Satoshi ASARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat treating equipment
- Publication number 20050175952
- Publication date Aug 11, 2005
- TOKYO ELECTRON LIMITED
- Katsuya Toba
- H01 - BASIC ELECTRIC ELEMENTS