Katsuyoshi Aikawa

Person

Kai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and recording medium
- Patent number 11,085,113
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 10,683,573
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus, method of depositing film, and non-trans...
- Patent number 10,428,425
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Katsuhiko Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, film forming method, and recording medium
- Patent number 10,072,336
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate position detecting apparatus, substrate processing appara...
- Patent number 9,404,184
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Katsuyoshi Aikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate position detection apparatus, film deposition apparatus e...
- Patent number 8,854,449
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Katsuyoshi Aikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical plasma processing apparatus for semiconductor process
- Patent number 8,394,200
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189813
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Katsuyoshi AIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Apparatus, Film Forming Method, and Recording Medium
- Publication number 20180327906
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND COMPUTER READ...
- Publication number 20170241018
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, METHOD OF DEPOSITING FILM, AND NON-TRANS...
- Publication number 20170211181
- Publication date Jul 27, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160138159
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM
- Publication number 20160122872
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE POSITION DETECTING APPARATUS, SUBSTRATE PROCESSING APPARA...
- Publication number 20140174351
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Katsuyoshi AIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PLAS...
- Publication number 20130047923
- Publication date Feb 28, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE POSITION DETECTION APPARATUS, FILM DEPOSITION APPARATUS E...
- Publication number 20120075460
- Publication date Mar 29, 2012
- TOKYO ELECTRON LIMITED
- Katsuyoshi AIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE POSITION DETECTION APPARATUS, SUBSTRATE POSITION DETECTIO...
- Publication number 20100124610
- Publication date May 20, 2010
- TOKYO ELECTRON LIMITED
- KATSUYOSHI AIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, FILM DEP...
- Publication number 20100055312
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20090078201
- Publication date Mar 26, 2009
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20070240644
- Publication date Oct 18, 2007
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Katsuyoshi Aikawa

Person

Patents Grantslast 30 patents

Film forming method and recording medium

Film forming apparatus

Film deposition apparatus, method of depositing film, and non-trans...

Film forming apparatus, film forming method, and recording medium

Substrate position detecting apparatus, substrate processing appara...

Substrate position detection apparatus, film deposition apparatus e...

Vertical plasma processing apparatus for semiconductor process

Patents Applicationslast 30 patents

MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS

Film Forming Apparatus, Film Forming Method, and Recording Medium

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND COMPUTER READ...

FILM DEPOSITION APPARATUS, METHOD OF DEPOSITING FILM, AND NON-TRANS...

FILM FORMING APPARATUS

FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM

SUBSTRATE POSITION DETECTING APPARATUS, SUBSTRATE PROCESSING APPARA...

FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PLAS...

SUBSTRATE POSITION DETECTION APPARATUS, FILM DEPOSITION APPARATUS E...

SUBSTRATE POSITION DETECTION APPARATUS, SUBSTRATE POSITION DETECTIO...

FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, FILM DEP...

VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS

VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS