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Katsuyuki Iwata
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Kudamatu-city, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for reduced-pressure epitaxial growth and method of contr...
Patent number
6,485,573
Issue date
Nov 26, 2002
Toshiba Ceramics Co., Ltd.
Katsuyuki Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlling rise and fall of temperature i...
Patent number
6,461,428
Issue date
Oct 8, 2002
Toshiba Ceramics Co., Ltd.
Shyuji Tobashi
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer heating device and method of controlling the same
Patent number
6,250,914
Issue date
Jun 26, 2001
Toshiba Machine Co., Ltd.
Hirofumi Katsumata
C30 - CRYSTAL GROWTH
Information
Patent Grant
Vapor deposition apparatus and vapor deposition method
Patent number
6,132,519
Issue date
Oct 17, 2000
Toshiba Ceramics Co., Ltd.
Tadashi Ohashi
C30 - CRYSTAL GROWTH
Information
Patent Grant
High-speed rotational vapor deposition apparatus and high-speed rot...
Patent number
6,113,705
Issue date
Sep 5, 2000
Toshiba Ceramics Co., Ltd.
Tadashi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vapor deposition apparatus and method for forming thin film
Patent number
6,059,885
Issue date
May 9, 2000
Toshiba Ceramics Co., Ltd.
Tadashi Ohashi
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Wafer transfer method performed with vapor thin film growth system...
Publication number
20030045128
Publication date
Mar 6, 2003
Toshiba Kikai Kabushiki Kaisha
Shyuji Tobashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer transfer method performed with vapor thin film growth system...
Publication number
20020182892
Publication date
Dec 5, 2002
Hideki Arai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of growing a thin film in gaseous phase and apparatus for gr...
Publication number
20020009868
Publication date
Jan 24, 2002
TOSHIBA CERAMICS CO., LTD.
Shyuji Tobashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for reduced-pressure epitaxial growth and method of contr...
Publication number
20010052316
Publication date
Dec 20, 2001
TOSHIBA CERAMICS CO., LTD.
Katsuyuki Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for controlling rise and fall of temperature i...
Publication number
20010020439
Publication date
Sep 13, 2001
Shyuji Tobashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...