Katsuyuki KOIZUMI

Person

Kurokawa-gun, Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support and plasma processing apparatus
- Patent number 11,935,729
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Hajime Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlling apparatus, temperature controlling method,...
- Patent number 11,837,480
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table including heat exchange medium path and substrate pro...
- Patent number 11,791,177
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 11,784,066
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Shota Ezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater power feeding mechanism
- Patent number 11,756,806
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,735,392
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 11,735,444
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Shota Ezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal regulator, substrate processing apparatus, and method of co...
- Patent number 11,705,347
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 11,694,881
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,515,194
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 11,373,884
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,011,347
- Issue date May 18, 2021
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlling apparatus, temperature controlling method,...
- Patent number 10,923,369
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 10,886,109
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 10,679,869
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck, placing table and plasma processing apparatus
- Patent number 10,593,522
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,515,786
- Issue date Dec 24, 2019
- Tokyo Electron Limited
- Shingo Koiwa
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Temperature control mechanism, temperature control method and subst...
- Patent number 10,199,246
- Issue date Feb 5, 2019
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for suppressing charging of component in vacuum processing c...
- Patent number 7,592,261
- Issue date Sep 22, 2009
- Tokyo Electron Limited
- Takehiro Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20240194458
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Hajime TAMURA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20240194457
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Hajime TAMURA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20230317474
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Shota EZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER POWER FEEDING MECHANISM
- Publication number 20210366741
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20210305025
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Hajime TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210280385
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...
- Publication number 20210134629
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20210104386
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20210057237
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Shota EZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210043476
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210043433
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Katsuyuki Koizumi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200402834
- Publication date Dec 24, 2020
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REGULATOR, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF CO...
- Publication number 20200388514
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20200266081
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190051501
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180374672
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20180350570
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...
- Publication number 20180102267
- Publication date Apr 12, 2018
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20170140954
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER POWER FEEDING MECHANISM
- Publication number 20170140958
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20170092472
- Publication date Mar 30, 2017
- Shingo KOIWA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...
- Publication number 20160225645
- Publication date Aug 4, 2016
- Tokyo Electron Limited
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, PLACING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20150311106
- Publication date Oct 29, 2015
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND PLASMA ETCHING APPARATUS
- Publication number 20130220545
- Publication date Aug 29, 2013
- TOKYO ELECTRON LIMITED
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for suppressing charging of component in vacuum processing c...
- Publication number 20050146277
- Publication date Jul 7, 2005
- TOKYO ELECTRON LIMITED
- Takehiro Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and method for asssembling the plasma p...
- Publication number 20040035364
- Publication date Feb 26, 2004
- Riki Tomoyoshi
- H01 - BASIC ELECTRIC ELEMENTS

Katsuyuki KOIZUMI

Person

Patents Grantslast 30 patents

Substrate support and plasma processing apparatus

Temperature controlling apparatus, temperature controlling method,...

Placing table including heat exchange medium path and substrate pro...

Stage and plasma processing apparatus

Heater power feeding mechanism

Plasma processing apparatus

Stage and plasma processing apparatus

Thermal regulator, substrate processing apparatus, and method of co...

Stage and plasma processing apparatus

Substrate processing apparatus, substrate processing system, and su...

Placing table and plasma treatment apparatus

Plasma processing apparatus

Temperature controlling apparatus, temperature controlling method,...

Stage and plasma processing apparatus

Placing table and plasma treatment apparatus

Electrostatic chuck, placing table and plasma processing apparatus

Mounting table and plasma processing apparatus

Temperature control mechanism, temperature control method and subst...

Method for suppressing charging of component in vacuum processing c...

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

STAGE AND PLASMA PROCESSING APPARATUS

HEATER POWER FEEDING MECHANISM

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...

STAGE AND PLASMA PROCESSING APPARATUS

STAGE AND PLASMA PROCESSING APPARATUS

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

THERMAL REGULATOR, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF CO...

PLACING TABLE AND PLASMA TREATMENT APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

STAGE AND PLASMA PROCESSING APPARATUS

TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...

PLACING TABLE AND PLASMA TREATMENT APPARATUS

HEATER POWER FEEDING MECHANISM

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...

ELECTROSTATIC CHUCK, PLACING TABLE AND PLASMA PROCESSING APPARATUS

SUBSTRATE MOUNTING TABLE AND PLASMA ETCHING APPARATUS

Method for suppressing charging of component in vacuum processing c...

Plasma processing apparatus and method for asssembling the plasma p...