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Katsuyuki Takahiro
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Fuchu City, JP
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Patents Grants
last 30 patents
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Patent Grant
Particle capture unit, method for manufacturing the same, and subst...
Patent number
8,821,607
Issue date
Sep 2, 2014
Tokyo Electron Limited
Tsuyoshi Moriya
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Patents Applications
last 30 patents
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Patent Application
PARTICLE CAPTURE UNIT, METHOD FOR MANUFACTURING THE SAME, AND SUBST...
Publication number
20120240533
Publication date
Sep 27, 2012
TOKYO ELECTRON LIMITED
Tsuyoshi Moriya
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...