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Method for growing thin oxide films
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Patent number 7,377,976
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Issue date May 27, 2008
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Mikko Ritala
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for growing thin oxide films
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Patent number 6,932,867
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Issue date Aug 23, 2005
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ASM International, NV.
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Mikko Ritala
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for growing thin oxide films
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Patent number 6,632,279
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Issue date Oct 14, 2003
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ASM Microchemistry, Oy
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Mikko Ritala
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...