Kaushal S. Patel

Person

Wappingers Falls, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Top antireflective coating composition containing hydrophobic and a...
- Patent number 8,304,178
- Issue date Nov 6, 2012
- International Business Machines Corporation
- Mahmoud Khojasteh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wet developable bottom antireflective coating composition and metho...
- Patent number 8,202,678
- Issue date Jun 19, 2012
- International Business Machines Corporation
- Kuang-Jung J. Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
High resolution imaging process using an in-situ image modifying layer
- Patent number 7,709,187
- Issue date May 4, 2010
- International Business Machines Corporation
- Kaushal Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Top antireflective coating composition containing hydrophobic and a...
- Patent number 7,608,390
- Issue date Oct 27, 2009
- International Business Machines Corporation
- Mahmoud Khojasteh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wet developable bottom antireflective coating composition and metho...
- Patent number 7,563,563
- Issue date Jul 21, 2009
- International Business Machines Corporation
- Kuang-Jung J. Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Top antireflective coating composition with low refractive index at...
- Patent number 7,544,750
- Issue date Jun 9, 2009
- International Business Machines Corporation
- Wu-Song S. Huang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Fluorinated photoresist materials with improved etch resistant prop...
- Patent number 7,217,496
- Issue date May 15, 2007
- International Business Machines Corporation
- Mahmoud Khojasteh
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method and apparatus for application of pressure to a workpiece by...
- Patent number 6,892,781
- Issue date May 17, 2005
- International Business Machines Corporation
- Dale C McHerron
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TOP ANTIREFLECTIVE COATING COMPOSITION CONTAINING HYDROPHOBIC AND A...
- Publication number 20100047712
- Publication date Feb 25, 2010
- International Business Machines Corporation
- Mahmoud Khojasteh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHO...
- Publication number 20090291392
- Publication date Nov 26, 2009
- International Business Machines Corporation
- Kuang-Jung J. Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF FORMING A DUAL-DAMASCENE STRUCTURE USING AN UNDERLAYER
- Publication number 20090093114
- Publication date Apr 9, 2009
- Sean David Burns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Resolution Imaging Process Using an In-Situ Image Modifying Layer
- Publication number 20080145793
- Publication date Jun 19, 2008
- International Business Machines Corporation
- Kaushal Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO REDUCE MECHANICAL WEAR OF IMMERSION LITHOGRAPHY APPARATUS
- Publication number 20080138631
- Publication date Jun 12, 2008
- International Business Machines Corporation
- Kaushal S. Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOP ANTIREFLECTIVE COATING COMPOSITION CONTAINING HYDROPHOBIC AND A...
- Publication number 20080032228
- Publication date Feb 7, 2008
- International Business Machines Corporation
- Mahmoud Khojasteh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wet developable bottom antireflective coating composition and metho...
- Publication number 20070243484
- Publication date Oct 18, 2007
- Kuang-Jung J. Chen
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Bottom antireflective coating composition and method for use thereof
- Publication number 20070231736
- Publication date Oct 4, 2007
- Kuang-Jung J. Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED LITHOGRAPHY AND ETCH FOR DUAL DAMASCENE STRUCTURES
- Publication number 20070166648
- Publication date Jul 19, 2007
- International Business Machines Corporation
- Shom Ponoth
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Top antireflective coating composition with low refractive index at...
- Publication number 20070087285
- Publication date Apr 19, 2007
- International Business Machines Corporation
- Wu-Song S. Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluorinated photoresist materials with improved etch resistant prop...
- Publication number 20060105269
- Publication date May 18, 2006
- International Business Machines Corporation
- Mahmoud Khojasteh
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method and apparatus for application of pressure to a workpiece by...
- Publication number 20030221777
- Publication date Dec 4, 2003
- International Business Machines Corporation
- Dale C. McHerron
- B30 - PRESSES

Kaushal S. Patel

Person

Patents Grantslast 30 patents

Top antireflective coating composition containing hydrophobic and a...

Wet developable bottom antireflective coating composition and metho...

High resolution imaging process using an in-situ image modifying layer

Top antireflective coating composition containing hydrophobic and a...

Wet developable bottom antireflective coating composition and metho...

Top antireflective coating composition with low refractive index at...

Fluorinated photoresist materials with improved etch resistant prop...

Method and apparatus for application of pressure to a workpiece by...

Patents Applicationslast 30 patents

TOP ANTIREFLECTIVE COATING COMPOSITION CONTAINING HYDROPHOBIC AND A...

WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHO...

METHOD OF FORMING A DUAL-DAMASCENE STRUCTURE USING AN UNDERLAYER

High Resolution Imaging Process Using an In-Situ Image Modifying Layer

METHOD TO REDUCE MECHANICAL WEAR OF IMMERSION LITHOGRAPHY APPARATUS

TOP ANTIREFLECTIVE COATING COMPOSITION CONTAINING HYDROPHOBIC AND A...

Wet developable bottom antireflective coating composition and metho...

Bottom antireflective coating composition and method for use thereof

INTEGRATED LITHOGRAPHY AND ETCH FOR DUAL DAMASCENE STRUCTURES

Top antireflective coating composition with low refractive index at...

Fluorinated photoresist materials with improved etch resistant prop...

Method and apparatus for application of pressure to a workpiece by...