Kaushik ALAYAVALLI

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Stress treatments for cover wafers
- Patent number 12,142,468
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vinayak Vishwanath Hassan
- B24 - GRINDING POLISHING
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 12,106,958
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Situ clean for bevel and edge ring
- Patent number 12,068,153
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Kaushik Alayavalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic-material shield around plasma chambers near pedestal
- Patent number 11,984,302
- Issue date May 14, 2024
- Applied Materials, Inc.
- Job George Konnoth Joseph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shunt door for magnets in plasma process chamber
- Patent number 11,959,174
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Kallol Bera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 11,721,545
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-stress boron-containing layers
- Patent number 11,495,454
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Huiyuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-stress carbon-containing layers
- Patent number 11,404,263
- Issue date Aug 2, 2022
- Applied Materials, Inc.
- Huiyuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater pedestal assembly for wide range temperature control
- Patent number 10,910,238
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Kaushik Alayavalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Horizontal heat choke faceplate design
- Patent number 10,907,252
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Yuxing Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate with embedded heater
- Patent number 10,889,894
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Daniel Hwung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for substrate processing chambers
- Patent number 10,600,624
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-channel showerhead for formation of film stacks
- Patent number 10,276,353
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Kaushik Alayavalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SWAPPER FOR A CLUSTER TOOL
- Publication number 20250033156
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Upendra UMMETHALA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
High Throughput Substrate Processing Cluster Tool With Factory Inte...
- Publication number 20250038021
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Upendra UMMETHALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...
- Publication number 20240290638
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20240271284
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Kallol BERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SITU CLEAN FOR BEVEL AND EDGE RING
- Publication number 20230386823
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION
- Publication number 20230377855
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Mukesh Shivakumaraiah CHITRADURGA
- B08 - CLEANING
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20230343586
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Anup Kumar SINGH
- B08 - CLEANING
Information Patent Application
STRESS TREATMENTS FOR COVER WAFERS
- Publication number 20230069395
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Vinayak Vishwanath Hassan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER C...
- Publication number 20220349050
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Rick KUSTRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS
- Publication number 20220319841
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Huiyuan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
- Publication number 20220139679
- Publication date May 5, 2022
- Applied Materials, Inc.
- Job George KONNOTH JOSEPH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20220102141
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Anup Kumar SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
- Publication number 20220064797
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay DHANAKSHIRUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS
- Publication number 20220044926
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Huiyuan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF LOW-STRESS BORON-CONTAINING LAYERS
- Publication number 20220044927
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Huiyuan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CLEANING METHODS FOR PROCESSING CHAMBERS
- Publication number 20210384015
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Huiyuan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20210269919
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Kallol BERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION ASSEMBLIES AND OPERATION THEREOF
- Publication number 20200098547
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Priyanka DASH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE WITH EMBEDDED HEATER
- Publication number 20200040452
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Daniel HWUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED CERAMIC FACEPLATE
- Publication number 20190226087
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE FACEPLATE WITH HYBRID MATERIAL DESIGN
- Publication number 20190226089
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE FACEPLATE WITH THERMAL CHOKE AND COOLING
- Publication number 20190226088
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HORIZONTAL HEAT CHOKE FACEPLATE DESIGN
- Publication number 20190119816
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20190122872
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL
- Publication number 20180082866
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-CHANNEL SHOWERHEAD FOR FORMATION OF FILM STACKS
- Publication number 20160322200
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPENSATING CONCENTRATION UNCERTAINITY
- Publication number 20130284090
- Publication date Oct 31, 2013
- Ganesh BALASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kaushik ALAYAVALLI

Person

Patents Grantslast 30 patents

Stress treatments for cover wafers

Method of using dual frequency RF power in a process chamber

Situ clean for bevel and edge ring

Magnetic-material shield around plasma chambers near pedestal

Shunt door for magnets in plasma process chamber

Gas delivery systems and methods

Method of using dual frequency RF power in a process chamber

Deposition of low-stress boron-containing layers

Deposition of low-stress carbon-containing layers

Heater pedestal assembly for wide range temperature control

Horizontal heat choke faceplate design

Faceplate with embedded heater

System and method for substrate processing chambers

Dual-channel showerhead for formation of film stacks

Patents Applicationslast 30 patents

SWAPPER FOR A CLUSTER TOOL

High Throughput Substrate Processing Cluster Tool With Factory Inte...

DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

SITU CLEAN FOR BEVEL AND EDGE RING

LOWER DEPOSITION CHAMBER CCP ELECTRODE CLEANING SOLUTION

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

STRESS TREATMENTS FOR COVER WAFERS

METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER C...

DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS

MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION

DEPOSITION OF LOW-STRESS CARBON-CONTAINING LAYERS

DEPOSITION OF LOW-STRESS BORON-CONTAINING LAYERS

PLASMA CLEANING METHODS FOR PROCESSING CHAMBERS

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

GAS DELIVERY SYSTEMS AND METHODS

GAS DISTRIBUTION ASSEMBLIES AND OPERATION THEREOF

FACEPLATE WITH EMBEDDED HEATER

HEATED CERAMIC FACEPLATE

HIGH TEMPERATURE FACEPLATE WITH HYBRID MATERIAL DESIGN

HIGH TEMPERATURE FACEPLATE WITH THERMAL CHOKE AND COOLING

HORIZONTAL HEAT CHOKE FACEPLATE DESIGN

SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS

HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL

DUAL-CHANNEL SHOWERHEAD FOR FORMATION OF FILM STACKS

COMPENSATING CONCENTRATION UNCERTAINITY