Kaustubh Kale

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Chelmsford, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Pressure regulated semiconductor wafer cooling apparatus and method...
- Patent number 12,181,191
- Issue date Dec 31, 2024
- Edwards Vacuum LLC
- Kaustubh Kale
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONNECTING AND DISCONNECTING A COOLING LOOP FROM A REFRIGERATION SY...
- Publication number 20240183592
- Publication date Jun 6, 2024
- Edwards Vacuum LLC
- Kaustubh Kale
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
A PRESSURE REGULATED SEMICONDUCTOR WAFER COOLING APPARATUS AND METH...
- Publication number 20230112125
- Publication date Apr 13, 2023
- Edwards Vacuum LLC
- Kaustubh Kale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A SEMICONDUCTOR WAFER TEMPERATURE CONTROL APPARATUS
- Publication number 20230056446
- Publication date Feb 23, 2023
- Edwards Vacuum LLC
- Kaustubh Kale
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...