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Kaveh F. Niazi
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for reducing plasma charge damage for plasma processes
Patent number
7,036,453
Issue date
May 2, 2006
Applied Materials, Inc.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of reducing plasma charge damage for plasma processes
Patent number
6,660,662
Issue date
Dec 9, 2003
Applied Materials, Inc.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High-permeability magnetic shield for improved process uniformity i...
Patent number
6,447,651
Issue date
Sep 10, 2002
Applied Materials, Inc.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF plasma source for material processing
Patent number
6,239,553
Issue date
May 29, 2001
Applied Materials, Inc.
Mike Barnes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit
Patent number
6,189,483
Issue date
Feb 20, 2001
Applied Materials, Inc.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone RF inductively coupled source configuration
Patent number
6,083,344
Issue date
Jul 4, 2000
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Apparatus for reducing plasma charge damage for plasma processes
Publication number
20040048492
Publication date
Mar 11, 2004
Applied Materials, Inc.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of reducing plasma charge damage for plasma processes
Publication number
20030024901
Publication date
Feb 6, 2003
APPLIED MATERIALS, INC.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH-PERMEABILITY MAGNETIC SHIELD FOR IMPROVED PROCESS UNIFORMITY I...
Publication number
20020127350
Publication date
Sep 12, 2002
APPLIED MATERIALS, INC.
Tetsuya Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...