Kaveh Zarkar

Person

Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Upstream volume mass flow verification systems and methods
- Patent number 9,952,078
- Issue date Apr 24, 2018
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Upstream volume mass flow verification systems and methods
- Patent number 8,793,082
- Issue date Jul 29, 2014
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Dual-mode mass flow verification and mass flow delivery system and...
- Patent number 7,891,228
- Issue date Feb 22, 2011
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
High accuracy mass flow verifier with multiple inlets
- Patent number 7,757,554
- Issue date Jul 20, 2010
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Integrated pressure and flow ratio control system
- Patent number 7,706,925
- Issue date Apr 27, 2010
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas delivery method and system including a flow ratio controller us...
- Patent number 7,673,645
- Issue date Mar 9, 2010
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas delivery method and system including a flow ratio controller us...
- Patent number 7,621,290
- Issue date Nov 24, 2009
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Grant
Critical flow based mass flow verifier
- Patent number 7,474,968
- Issue date Jan 6, 2009
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Compensation for thermal siphoning in mass flow controllers
- Patent number 7,467,027
- Issue date Dec 16, 2008
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow verifiers capable of providing different volumes, and rel...
- Patent number 7,461,549
- Issue date Dec 9, 2008
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Vertical mount mass flow sensor
- Patent number 7,296,465
- Issue date Nov 20, 2007
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
System and method for in-situ flow verification and calibration
- Patent number 6,955,072
- Issue date Oct 18, 2005
- MKS Instruments, Inc.
- Kaveh Zarkar
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Upstream Volume Mass Flow Verification Systems and Methods
- Publication number 20150066395
- Publication date Mar 5, 2015
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Application
Upstream volume mass flow verification systems and methods field of...
- Publication number 20110022334
- Publication date Jan 27, 2011
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Application
Dual-Mode Mass Flow Verification and Mass Flow Delivery System and...
- Publication number 20100125424
- Publication date May 20, 2010
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Application
High Accuracy Mass Flow Verifier with Multiple Inlets
- Publication number 20090112504
- Publication date Apr 30, 2009
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Application
Integrated pressure and flow ratio control system
- Publication number 20080167748
- Publication date Jul 10, 2008
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Application
Gas delivery method and system including a flow ratio controller us...
- Publication number 20070186983
- Publication date Aug 16, 2007
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Application
Compensation for thermal siphoning in mass flow controllers
- Publication number 20070174016
- Publication date Jul 26, 2007
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Application
Vertical mount mass flow sensor
- Publication number 20070113641
- Publication date May 24, 2007
- MKS Instruments, Inc.
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Application
Critical flow based mass flow verifier
- Publication number 20060283254
- Publication date Dec 21, 2006
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Application
Gas delivery method and system including a flow ratio controller us...
- Publication number 20060237063
- Publication date Oct 26, 2006
- Junhua Ding
- G05 - CONTROLLING REGULATING
Information Patent Application
System and method for in-situ flow verification and calibration
- Publication number 20040261492
- Publication date Dec 30, 2004
- Kaveh Zarkar
- G05 - CONTROLLING REGULATING

Kaveh Zarkar

Person

Patents Grantslast 30 patents

Upstream volume mass flow verification systems and methods

Upstream volume mass flow verification systems and methods

Dual-mode mass flow verification and mass flow delivery system and...

High accuracy mass flow verifier with multiple inlets

Integrated pressure and flow ratio control system

Gas delivery method and system including a flow ratio controller us...

Gas delivery method and system including a flow ratio controller us...

Critical flow based mass flow verifier

Compensation for thermal siphoning in mass flow controllers

Mass flow verifiers capable of providing different volumes, and rel...

Vertical mount mass flow sensor

System and method for in-situ flow verification and calibration

Patents Applicationslast 30 patents

Upstream Volume Mass Flow Verification Systems and Methods

Upstream volume mass flow verification systems and methods field of...

Dual-Mode Mass Flow Verification and Mass Flow Delivery System and...

High Accuracy Mass Flow Verifier with Multiple Inlets

Integrated pressure and flow ratio control system

Gas delivery method and system including a flow ratio controller us...

Compensation for thermal siphoning in mass flow controllers

Vertical mount mass flow sensor

Critical flow based mass flow verifier

Gas delivery method and system including a flow ratio controller us...

System and method for in-situ flow verification and calibration