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Kay SONG
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for fabricating dielectric structures
Patent number
9,564,329
Issue date
Feb 7, 2017
AIXTRON, SE
Kay Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method and Apparatus for Fabricating Dielectric Structures
Publication number
20150155157
Publication date
Jun 4, 2015
Aixtron, Inc.
Kay Song
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES
Publication number
20120083134
Publication date
Apr 5, 2012
Hui-Jung WU
H01 - BASIC ELECTRIC ELEMENTS