Kayoko Nakano

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 6,692,165
- Issue date Feb 17, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Akiko Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution applying method and apparatus
- Patent number 6,440,218
- Issue date Aug 27, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus
- Publication number 20020121341
- Publication date Sep 5, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Akiko Tanaka
- H01 - BASIC ELECTRIC ELEMENTS