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Kaz Yoshioka
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Austin, TX, US
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last 30 patents
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Patent Grant
Method and system for drying a substrate
Patent number
7,582,414
Issue date
Sep 1, 2009
Tokyo Electron Limited
Chung-Peng Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and system for drying a substrate
Patent number
7,070,915
Issue date
Jul 4, 2006
Tokyo Electron Limited
Chung-Peng Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Method and system for drying a substrate
Publication number
20060216651
Publication date
Sep 28, 2006
TOKYO ELECTRON LIMITED
Chung-Peng Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and system for drying a substrate
Publication number
20050046934
Publication date
Mar 3, 2005
TOKYO ELECTRON LIMITED
Chung-Peng Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY