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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of forming mask structure
Patent number
9,388,495
Issue date
Jul 12, 2016
Tokyo Electron Limited
Masahisa Watanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of Forming Mask Structure, Film Forming Apparatus and Non-Tr...
Publication number
20150125606
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Masahisa WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...