Kazuaki Hota

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Sagamihaa-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme UV radiation source and semiconductor exposure device
- Patent number 6,984,941
- Issue date Jan 10, 2006
- Ushiodenki Kabushiki Kaisha
- Tatumi Hiramoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Extreme UV radiation source and semiconductor exposure device
- Publication number 20040183038
- Publication date Sep 23, 2004
- Ushiodenki Kabushiki Kaisha
- Tatumi Hiramoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR